الفهرس 
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Abstract
Today, the brilliant optical properties of plasmonic metal nitrides are very interest for both experimentally and theoretically studies due to their accessibility and applicability in many fields. In this thesis, TiN was used to fabricate photodetector and modeling glucose sensor.
The TiO2/TiN nanotubes were deposited on a porous aluminum oxide template (PAOT) for light power intensity and wavelength detection. The PAOT was fabricated by the Ni- imprinting technique through a two-step anodization method. The TiO2/TiN layers were deposited by using atomic layer deposition and magnetron sputtering, respectively. The PAOT and PAOT/TiO2/TiN were characterized by several techniques such as X-ray diffraction (XRD), scanning electron microscope (SEM), and energy dispersive X-ray (EDX). The PAOT has high-ordered hexagonal nanopores with dimensions” ” ” ” " ~ " ” ” ” ” 320 nm pore diameter and” ” ” ” " ~ " ” ” ” ” 61 nm interpore distance. The bandgap of PAOT/TiO2 decreased from 3.1 to 2.2 eV with enhancing absorption of visible light after deposition of TiN on the PAOT/TiO2. The PAOT/TiO2/TiN as photodetector has a responsivity (R) and detectivity (D) of 450 mAW-1 and 8.0 × 1012 Jones, respectively. Moreover, the external quantum efficiency (EQE) was 9.64 % at 62.5 mW.cm−2 and 400 nm. Hence, the fabricated photodetector (PD) has a very high photoelectrical response due to hot electrons from the TiN layer, which makes it very hopeful as a broadband photodetector.
For glucose sensor, model light-confining Fano resonance based on titanium nitrides (TiN)-coated titanium oxide one-dimensional photonic crystal was investigated. There is a cavity layer filled with a glucose solution between TiN thin layer and photonic crystals. The reflection spectrum was calculated numerically by using Bruggeman’s effective medium approximation (BEMA) and transfer matrix method (TMM). The effect of plasmonic layer thickness, cavity layer thickness, and the thicknesses of the titanium oxide nanotube layers were optimized to achieve high performance sensor. The result shows that the Fano resonances shift to higher wavelengths with increasing glucose concentration. The best sensitivity of the optimized biosensor is about 3798.32 nm/RIU. Also, the sensor performance parameters such as the limit of detection (LoD), figure of merits (FoM), and quality factor (QF) were discussed. The proposed sensor could be of potential interest due to its easy fabrication and higher performance than many previous reported sensors in the sensing field.